Photoresist coating

Photoresist coating

UV LED lithography machine


Contact person

Mr. Huang
  • Specification
  • Describe
Application range: *Semiconductor
*Passive Component
*Touch Panel
*Display Panel
*Light Emitting Diode (LED)
Specification: *Exposure light source: UV LED (365nm、405nm、436nm)
*Substrate Size 2”~8”、8”~12”
*Uniformity: ≦5%
*Alignment Accuracy: +- 1um
*Throughput:≧60 wph

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