Photoresist coating
| Application range: |
*Semiconductor *MEMS *Passive Component *Touch Panel *Display Panel *Light Emitting Diode (LED) |
|---|---|
| Specification: |
*Exposure light source: UV LED (365nm、405nm、436nm) *Substrate Size 2”~8”、8”~12” *Uniformity: ≦5% *Alignment Accuracy: +- 1um *Throughput:≧60 wph |
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