Photoresist coating
| Application range: |
Semiconductor、MEMS Passive Component, Touch Panel Display Panel, LED |
|---|---|
| Basic specifications: |
Exposure light source: 3.5KW、5KW、8KW、10KW Substrate Size 2”~8”、8”~12” Uniformity: ≦ 5% Alignment Accuracy: ± 1um Throughput: ≧90 wph |
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