Photoresist coating

Photoresist coating

Auto Aligner


Contact person

Mr. Huang
  • Specification
  • Describe
Application range: Semiconductor、MEMS
Passive Component, Touch Panel
Display Panel, LED
Basic specifications: Exposure light source: 3.5KW、5KW、8KW、10KW
Substrate Size 2”~8”、8”~12”
Uniformity: ≦ 5%
Alignment Accuracy: ± 1um
Throughput: ≧90 wph

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