Photoresist coating

Photoresist coating

Manual Aligner


Contact person

Mr. Huang
  • Specification
  • Describe
Application range: *Semiconductor
*Passive Component
*Touch Panel
*Display Panel
Specification: *Exposure light source: 350W、500W、1KW、2KW
*Substrate Size 2”、4”、6”、8”、10”、12”-up to 24”
*Uniformity: > ±3% and <±5%
*Alignment Accuracy: ± 1um
*Throughput:≧65 wph
Advantage: Patented leveling correction mechanism/high-precision, user-friendly operation interface, module customization according to process requirements.
Optional double-sided alignment process: Back Side IR (infrared light alignment) / Bacj Side Visible (back CCD/microscope alignment).

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